Fab Simulation Models

SEMATECH produced a series of three simulation models for several automated material handling system configurations. These models were produced in conjunction with Brooks-PRI Automation. These models use Brooks-PRI's recommended configuration of fab model in AutoSchedTM AP and AMHS model in AutoModTM with a communication model link between the two.

Installation Documentation (self-extracting zip) includes:

  • a Microsoft Word file that tells how to install the models
  • a Microsoft Word file that describes how to use the models
  • an experiment report (Acrobat PDF) that describes some experiments accomplished with the base-line model

Required Custom Extensions for all Models
This self-extracting zip file includes four directories that must be placed in the "custext" directory of the AutoSchedTM AP installation for the models to work. Requires: AutoMod version 9.1, AutoSchedTM AP version 7.1.71, and the Model Communications Module (MCM).

Simulation Models of Advance Automated Material Handling Systems

Each of the following models require AutoMod version 9.1, AutoSchedTM AP version 7.1.71, and the Model Communications Module (MCM). This simulation software is available through Brooks-PRI Automation.

Each model is in a self-extracting zip file that contains two directories. The *****.asd directory contains the AutoSchedTM AP fab model while the ******.arc directory contains the AutoMod AMHS model. The installation documentation file (above) explains how to build models from these files.

Also included with each model is a video file (which does not require the simulation software to view) that includes about a minute of simulation running at twice real speed. These are AVI files that run under the Microsoft Video Player.

  1. The Base-Line Model uses inter-bay and intra-bay transport systems with stockers for transfer between the systems. Requires: AutoMod version 9.1, AutoSchedTM AP version 7.1.71, and the Model Communications Module (MCM)

    To download the Base-Line Model, you must consent to the license agreement.

    Video of Base-Line Model (WinZIP file) - Requires: Microsoft Video Player for viewing

  2. The Tool-to-Tool Vehicle Model uses one integrated inter-bay and intra-bay system to transport directly from one tool to the next tool in the route. Requires: AutoMod version 9.1, AutoSchedTM AP version 7.1.71, and the Model Communications Module (MCM)

    To download the Tool-to-Tool Vehicle Model, you must consent to the license agreement.

    Video of Tool-to-Tool Model (WinZIP file) - Requires: Microsoft Video Player for viewing

  3. While the first two models use Over Head Transport (OHT) vehicle systems, the Conveyor-Based Tool-to-Tool Model uses a conveyor system for transport between tools. Requires: AutoMod version 9.1, AutoSchedTM AP version 7.1.71, and the Model Communications Module (MCM)

    To download the Conveyor-Based Tool-to-Tool Model, you must consent to the license agreement.

    Video of Conveyor Model (WinZIP file) - Requires: Microsoft Video Player for viewing

All three of these models have an independent reticle handling system and have been designed with a lot of flexibility which we hope will provide for reuse by our member companies. Some of this flexibility includes variable load port buffers on tools, easily alterable vehicle quantities, velocities, and down times. Two kinds of vehicle down times have been established: failures that require removal of vehicles from tracks and those that require only a reset.

The models can be run linked or independently. When running linked, the fab model can create a From-To Matrix that can be used later for stand alone AutoSchedTM AP runs to emulate the material handling delays.