Previous Meeting Proceedings

Topics:
 

Lithography

Emerging Technologies

17-19 Jan 2005 Maskless Workshop

Litho Forum
04-05 May 2006 Litho Forum
28-29 Jan 2004 Litho Forum

Extreme Ultraviolet Lithography (EUVL)
19 Oct 2006 EUV Source Workshop
15-18 Oct 2006 EUVL Symposium 2006
25 May 2006 EUV Source Workshop
7-9 Nov 2005 EUVL Symposium 2005
10 Nov 2005 EUV Mask Standards Workshop
10 Nov 2005 EUV Source Workshop
10 Nov 2005 Optics Lifetime and Contamination Workshop
13 Jul 2005 SEMI EUV Reticle Protection and Handling Standards Subcommittee Meeting
28 Feb 2005 EUV Mask Workshop
27 Feb 2005 EUV Source Workshop
5 Nov 2004 EUV Source Workshop
4 Nov2004 EUV Source Modeling Workshop
1-4 Nov 2004 3rd EUVL Symposium
1 Nov 2004 EUV Mask Workshop
13 Jul 2004 SEMI EUV Masks Standards Meeting
22 Feb 2004 EUV Source Workshop
22 Feb 2004 EUV Mask Technology Workshop
3 Oct 2003 EUV Mask Handling, Chucking, and Standards Workshop
30 Sep 2003 2nd EUVL Symposium
29 Sep 2003 EUV Source Workshop
14 Jul 2003 SEMI EUVL Mask Standards Meetings
23 Feb 2003 EUVL Source Workshop
23 Feb 2003 EUV Mask and Chuck & EUV Mask Handling Standards Working Groups
22 Feb 2003 Optics Lifetime/Contamination Workshop
17 Oct 2002 Reticle Handling Working Group Meeting
15-17 Oct 2002    EUVL Symposium (Order)
14 Oct 2002 EUVL Source Workshop
7 Mar 2002 EUV Mask Mechanical Fixturing in Write, Metrology, and Exposure Tools
4 Mar 2002 EUV Mask Development Seminar
3 Mar 2002 EUV Source Workshop
29 Oct 2001 EUVL Source Workshop
2 Mar 2001 2nd International EUVL Source Workshop and Status Update
19-20 Oct 2000 2nd International EUVL Workshop
12 Oct 1999 1st International EUVL Workshop

Immersion
2-5 Oct 2006 3rd International Symposium on Immersion Lithography
3-5 Aug 2004 Immersion & 157 nm Symposium
28 Jan 2004 Immersion Workshop

Mask
9 Feb 2005 Mask Automation Workshop
2 Feb 2004 Mask Supply Workshop
9-12 Sep 2003 SPIE International Symposium - Photomask Technology
7 Mar 2002 EUV Mask Mechanical Fixturing in Write, Metrology, and Exposure Tools
4 Mar 2002 EUV Mask Development Seminar
1 Oct 2001 Mask Suppliers Workshop
11-12 Jul 2001 Mask EDA Workshop

Next-Generation Lithography (NGL)
29-30 Aug 2001 5th NGL Workshop
27-28 Aug 2001 Maskless Lithography Workshop
6-9 Aug 2001 5th International Workshop on High-Throughput Charged Particle Lithography
25-26 Sep 2000    4th NGL Workshop

157 nm Lithography
25-28 Aug 2003 4th International Symposium on 157nm Lithography (Order)
3-6 Sep 2002 Third International 157nm Symposium (Order)
12-13 Dec 2001 157 nm Technical Data Review
 

Manufacturing
Next Wafer Size
Dec 2007 Fab Transition Strategy - Industry Briefing (PDF)
Oct 2007 Fab Transition Strategy - Industry Briefing (PDF)
July 2007 ISMI 450mm Industry Briefing (PDF)
06 Dec 2006 ISMI 300 Prime / 450mm Industry Briefing (PDF)
   
e-Manufacturing
04 Dec 2007 e-Manufacturing Workshop
20 Jul 2007 e-Manufacturing Workshop
05 Dec 2006 e-Manufacturing Workshop
14 Jul 2006 e-Manufacturing Workshop
06 Apr 2006 e-Manufacturing/SEMI Standards Workshop
(requires QuickPlace Upload Control, available for download from SEMI)
06 Dec 2005 e-Manufacturing Workshop
30 Nov 2005 e-Manufacturing Workshop
15 Jul 2005 e-Manufacturing Interface A Workshop
11 Apr 2005 e-Manufacturing and e-Diagnostics Workshop
Username: semiconeuropa2005 - Password: Munich
06 Dec 2004  Equipment Data Acquisition (EDA) Workshop (PDF)
30 Nov 2004 Equipment Data Acquisition (EDA) Workshop (PDF)
29 Oct 2004  e-Manufacturing Interface-A Workshop
11 Oct 2004 Supplier meetings: EDA Roadmap
16 Jul 2004 Equipment Data Acquisition (EDA) Workshop
20 Apr 2004 e-Manufacturing / e-Diagnostics Workshop
18 Jul 2003 e-Diagnostics/e-Manufacturing Workshop
31 Mar 2003 e-Manufacturing Standards Workshop
18 Mar 2003 e-Manufacturing Standards Workshop & SEMI Software Symposium
03 Dec 2002 e-Manufacturing Workshop
18 Oct 2002 e-Manufacturing Workshop
26 Jul 2002 e-Diagnostics/EEC Workshop
16 Apr 2002 e-Diagnostics and e-Manufacturing Seminar
04 Dec 2001 e-Diagnostics and EEC Workshop
19 Oct 2001 e-Diagnostics and EEC Workshop
20 Jul 2001 e-Diagnostics and EEC Workshop
25 Apr 2001 e-Diagnostics Seminar
23 Mar 2001 e-Diagnostics Seminar
01 Mar 2001 e-Diagnostics Seminar
23 Feb 2001 e-Manufacturing and APC/Fault Detection and Classification Workshop
06 Dec 2000 e-Diagnostics Workshop
05 Dec 2000 e-Diagnostics Workshop
19 Oct 2000 e-Diagnostics Seminar
20 Sep 2000 e-Diagnostics Working Group Meeting
29 Jun 2000 e-Diagnostics Working Group Meeting
 

Global Economic Workshops and Symposia
18 Nov 2004 Global Economic Symposium (Order)
22 May 2004 Global Economic Symposium (Order)
18 Nov 2003 Global Economic Symposium (Order)
21 May 2003 Global Economic Symposium (Order)
22 May 2003 Economic Modeling Workshop
21 Nov 2002 Global Economic Symposium
19-20 Nov 2002 Economic Modeling Workshop
23 May 2002 Global Economic Symposium (PDF)
21-22 May 2002 Economic Modeling Workshop
30 Nov 2001 Global Economic Symposium (PDF)
27-30 Nov 2001 Economic Modeling Workshop
1-3 Aug 2001 Early Industry Economic Model Workshop
11 Apr 2001 Global Economic Workshop
09 Nov 2000 Global Economic Workshop
14 Jul 2000 Global Economic Symposium
31 Mar 2000 Global Economic Workshop
22 Oct 1999 Global Economic Symposium
14 May 1999 Global Economic Workshop
 

Materials and Processes

04-05 May 2006 2006 Surface Preparation and Cleaning Conference
26-28 Sep 2005 2nd International Workshop on Advanced Gate Stack Technology
04 Dec 2005 New Channel Materials for Future MOSFET Technology
 

Others
20-22 Mar 2007 Predictive and Preventative Maintenance (PPM) Working Group Meeting (PDF)
15 Mar 2006 SEMATECH Symposium Japan
13 September 2007 SEMATECH Symposium Japan
 

Reliability Meetings
25 Oct 2004 Topical Research Conference on Reliability, 7th Annual
27 Oct 2003 Topical Research Conference on Reliability, 6th Annual
28 Oct 2002 Topical Research Conference on Reliability, 5th Annual
30 Oct 2000 Topical Research Conference on Reliability, 4th Annual
 

Electrostatic Discharge
12 Dec 2003 EFM: A Pernicious New Electric Field Induced Damage Mechanism in Reticles
28 Oct 2002 Fundamentals of ESD (Electrostatic Discharge) Training
14 Oct 2002 Electrostatic Discharge Impact and Control Workshop
15 Oct 2001 Electrostatic Discharge Impact and Control Workshop
19 Oct 2000 Electrostatic Discharge Impact and Control Workshop