ISMI Manufacturing Week
ISMI Supplier Leadership - Equipment Energy Workshop
Tuesday, November 2
8AM-5PM
Facilitator: Thomas Huang, ISMI
This 2-part workshop will provide a forum for integrated device manufacturers (IDMs) and the semiconductor industry's key suppliers of fab capital and support equipment to collaborate on progressing energy reduction for semiconductor processing equipment.
Workshop Topics
- SEMI S23 Updates – As users request SEMI S23 data for purchased equipment, ISMI is facilitating suppliers in adopting the standards. Suppliers will give updates on their progress using the standard for the ultimate goal of reducing the total energy impact of process equipment.
- Utility Over Specification – ISMI is working to address the problem of nameplate capacity being well beyond the actual power consumption. The focus in this workshop is to bring suppliers and users together to eliminate redundancy in oversizing and work towards more realistic nameplate ratings for many configurations of equipment and processes. Currently the scope is electrical power and may extend to other utilities, such as water.
- Standardized tool interface for equipment idle mode – ISMI is working to standardize the interface between support tools such as roughing pumps, abatement and the mainframe tool. The goal in this workshop is to facilitate agreement among suppliers of what the standard communication protocol should be.
Morning Session (8AM-NOON)
This session will feature presentations by industry experts on current industry trends in energy conservation, up-to-date information on ISMI's energy conservation projects, and an open forum discussion led by ISMI in which the IDM community will share their point of view on future development needs and discuss any potential technical and economic constraints with equipment mainframe and component suppliers. The focus will be to reach consensus on barriers to development and how to address them.
Attendance at this session of the workshop is open to the public.
Afternoon Session (1-5PM)
This session will provide an opportunity for suppliers to present their latest information on SEMI S23- measurements and their strategy on future energy consumption reduction to ISMI member companies and other IDMs. Representatives the IDM community will provide feedback on the presentations and also share their point of view on future development needs with the mainframe and component suppliers.
Attendance at this session of the workshop is restricted to ISMI member companies and other IDMs to allow suppliers to present their developments without competitors present.
About the Facilitator
Thomas Huang is a project manager for the Energy Project in ISMI’s ESH Technology Development Group. He has 14 years experience in the semiconductor industry in equipment and facilities, including the completion of the Phase 1 start-up of Samsung’s 300mm 300ksf flash fabrication facility in Austin, Texas. Huang holds a Bachelor of Science in Mechanical Engineering from The University of Texas at Austin. He is a Registered Professional Engineer in Texas, and a LEED® Accredited Professional with the United States Green Building Council.
How to Register
All attendees must register to attend this workshop. For verification purposes, ISMI members and other IDMs planning on attending the afternoon session must register using your company e-mail address.
There is no registration fee for this workshop.
